Waviness (Mid-spatial frequency roughness)
RMS value of Residual error from surface of Low-order Zernike Polynomials in Clear Aperture is defined and evaluated as waviness. Low scattering and better contrast are gained by reducing waviness (MSFR).
Measurement: Laser Interferometer (Zygo - VFA),
White Light Interferometer: (Zygo - NewView)
RMS of waviness < 3nm
This technology can be applied to the following lenses:
Asphere, Sphere, Plano (as of Apr., 2014)
Convex asphere (φ28mm)